In-plane microelectromechanical resonator with integrated Fabry-Perot cavity

A silicon-on-insulator in-plane microelectromechanical resonator coupled to a high-Q (Q approximate to 4,200), high finesse (F-Max = 265) optical Fabry-Perot microcavity is presented. The cavity utilizes high reflectance dry-etched silicon/air distributed Bragg reflectors. By suspending one of the Bragg mirrors to a microbridge resonator, the mirror can be displaced and the cavity is tuned. Using electrostatic actuation, bidirectional cavity tuning from -12.1 to + 17.0 nm (29.1 nm total range) is demonstrated near 1601 nm wavelength. The device also enables measurement of thermal-mechanical noise with sensitivity better than 10 fm/Hz(1/2) and may find application in high resolution sensors. (C) 2008 American Institute of Physics.