Concepts, characterization and modeling of MEMS micro-switches with gold contacts in MUMPs

被引：2
|
作者：
Lafontan, X [1 ]
Dufaza, C [1 ]
Robert, M [1 ]
Pressecq, F [1 ]
Perez, G [1 ]
机构：
[1] LIRMM, F-34392 Montpellier 5, France
来源：
DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷
关键词：
microswitch; electrical contact; MUMPs; contact modeling; gold-gold contact characterization; electrical resistance; relay; tribology of contact;
D O I：
10.1117/12.425354
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper demonstrates that RF MEMS micro-switches can be realized with a low cost MEMS technology such as MUMPS. Two different switches are proposed, namely the hinged beam switch and the gold overflowing switch. Their concepts, design and characterization are described in details. On-resistance as low as 5-6 Omega for the gold overflowing switch and 2-3 Omega for the hinged beam switch have been measured. Finally, experimental measurements showed that force and electrical current had strong influences on the overall electrical contact.
引用
收藏
页码：381 / 390
页数：10
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