Development of a four-degrees-of-freedom diffraction sensor

被引：6

作者：

Liu, Chien-Hung

Jywe, Wen-Yuh

Chen, Cha'o-Kuang

Hsien, W. H.

Shyu, Lih-Horng

Ji, Liang-Wen

Liu, Van-Tsai

Hsu, Tung-Hui

Chen, Chih-Da

机构：

[1] Graduate Institute of Electro-Optical and Materials Science, National Formosa University

[2] Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University

[3] Department of Mechanical Engineering, National Cheng Kung University, Tainan

[4] Department of Electrical Engineering, National Formosa University, Huwei

[5] Department of Mechanical Engineering, National Chung-Cheng University, Chiayi

[6] Institute of Mechtronoptic Systems, Chien Kuo University of Technology, Changhua

来源：

4th International Symposium on Instrumentation Science and Technology (ISIST' 2006) | 2006年 / 48卷

关键词：

D O I：

10.1088/1742-6596/48/1/036

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The development of a diffraction-type four-degrees-of-freedom sensor based on the three-dimensional diffraction method and collimation method is described in this paper. This sensor is designed to be integrated with a linear laser encoder to allow five-degrees-of-freedom measurement. It is composed of a miniature collimation-type sensor, a reflective diffraction grating and a quadrant detector to simultaneously measure a straightness error and three rotational angles. Based on the diffraction method, the reflective diffraction grating reflects the incident laser from the collimation-type sensor to several diffractive laser rays and only the 0 and +1-order diffractive laser rays are detected by the collimation-type sensor and a quadrant detector respectively. According to the changed spot positions of the diffraction laser lights on the collimation-type sensor and the quadrant detector, a straightness error and the three rotational errors can be solved simultaneously.

引用

页码：196 / 201

页数：6

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