Rapid measurement of charged particle beam profiles using a current flux grating

被引：0

作者：

Paul, Samit ^{[1
]}

Chowdhury, Abhishek ^{[1
]}

Bhattacharjee, Sudeep ^{[1
]}

机构：

[1] Indian Inst Technol, Dept Phys, Kanpur 208016, UP, India

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 02期

关键词：

SECONDARY-ELECTRON EMISSION; FAILURE ANALYSIS; ARGON IONS;

D O I：

10.1063/1.4907346

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The principle and physics issues of charged particle beam diagnostics using a current flux grating are presented. Unidirectional array of conducting channels with interstitial insulating layers of spacing d is placed in the beam path to capture flux of charge and electronically reproduce an exact beam current profile with density variation. The role of secondary electrons due to the impinging particle beam (both electron and ion) on the probe is addressed and a correction factor is introduced. A 2-dimensional profile of the electron beam is obtained by rotating the probe about the beam axis. Finally, a comparison of measured beam profile with a Gaussian is presented. (C) 2015 AIP Publishing LLC.

引用

页数：6

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