Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

被引：108

作者：

Vitek, Dawn N. ^{[1
]}

Adams, Daniel E. ^{[1
]}

Johnson, Adrea ^{[1
]}

Tsai, Philbert S. ^{[2
]}

Backus, Sterling ^{[3
]}

Durfee, Charles G. ^{[1
]}

Kleinfeld, David ^{[2
]}

Squier, Jeffrey A. ^{[1
]}

机构：

[1] Colorado Sch Mines, Dept Phys, Ctr Microintegrated Opt Adv Bioimaging & Control, Golden, CO 80401 USA

[2] Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA

[3] Kapteyn Murnane Labs Inc, Boulder, CO 80301 USA

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 17期

关键词：

FABRICATION; ABLATION; GLASS;

D O I：

10.1364/OE.18.018086

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (similar to 1 mm) features with parallel sidewalls are ablated at high material removal rates (25 mu m(3) per 80 mu J pulse) at 0.04-0.05 NA. This technique is applied to the fabrication of microfluidic devices by ablation through the back surface of thick (6 mm) fused silica substrates. It is also used to ablate bone under aqueous immersion to produce craniotomies. (C) 2010 Optical Society of America

引用

页码：18086 / 18094

页数：9

共 50 条

[21] Numerical solutions of Green's integral equation for the diffraction of femtosecond laser pulses through a subwavelength aperture
任晓荣
程传福
刘春香
宋洪胜
张宁玉
徐至展
Chinese Optics Letters, 2004, (02) : 63 - 66
[22] Photo-induced microstructures in transparent materials with femtosecond laser pulses
Watanabe, W
Yamada, K
Kuroda, D
Shinagawa, T
Itoh, K
Nishii, J
Hayashi, K
CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST, 2001, : 602 - 603
[23] Rapid microfabrication of transparent materials using filamented femtosecond laser pulses
S. Butkus
E. Gaižauskas
D. Paipulas
Ž. Viburys
D. Kaškelyė
M. Barkauskas
A. Alesenkov
V. Sirutkaitis
Applied Physics A, 2014, 114 : 81 - 90
[24] Parameters Affecting the Welding of Transparent Materials Using Femtosecond Laser Pulses
Shanshool H.M.
Naser H.
Hadi N.M.
Flaih H.A.
Abbas F.M.
Hussin M.J.
Hindal S.S.
Lasers in Manufacturing and Materials Processing, 2020, 7 (01) : 59 - 73
[25] Laser Processing Transparent Materials with Nanosecond, Picosecond and Femtosecond pulses for Industrial Applications
Zhang, Jie
Tao, Sha
Chen, Wei
Wang, Brian
Ou, Zhilong
Zhao, Jay
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXIII, 2018, 10519
[26] Femtosecond laser micromachining and microfabrication in transparent materials - art. no. 68250K
Li, Yan
Liu, Dayong
Qi, Fengjie
Yang, Hong
Gong, Qihuang
LASERS IN MATERIAL PROCESSING AND MANUFACTURING III, 2008, 6825 : K8250 - K8250
[27] Asymmetry of light absorption upon propagation of focused femtosecond laser pulses with spatiotemporal coupling through glass materials
Zhukov, Vladimir P.
Bulgakova, Nadezhda M.
NONLINEAR OPTICS AND APPLICATIONS X, 2017, 10228
[28] Space-selective laser joining of dissimilar transparent materials using femtosecond laser pulses
Watanabe, Wataru
Onda, Satoshi
Tamaki, Takayuki
Itoh, Kazuyoshi
Nishii, Junji
APPLIED PHYSICS LETTERS, 2006, 89 (02)
[29] Acoustic-resolution photoacoustic microscopy based on an optically transparent focused transducer with a high numerical aperture
Fang, Cheng
Zou, Jun
OPTICS LETTERS, 2021, 46 (13) : 3280 - 3283
[30] Temporally shaped femtosecond laser pulses as direct patterning method for dielectric materials in nanophotonic applications
Meinl, Tamara
Goette, Nadine
Khan, Yousuf
Kusserow, Thomas
Sarpe, Cristian
Koehler, Jens
Wollenhaupt, Matthias
Senftleben, Arne
Baumert, Thomas
Hillmer, Hartmut
NANOPHOTONICS V, 2014, 9126

← 1 2 3 4 5 →