Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

被引：108

作者：

Vitek, Dawn N. ^{[1
]}

Adams, Daniel E. ^{[1
]}

Johnson, Adrea ^{[1
]}

Tsai, Philbert S. ^{[2
]}

Backus, Sterling ^{[3
]}

Durfee, Charles G. ^{[1
]}

Kleinfeld, David ^{[2
]}

Squier, Jeffrey A. ^{[1
]}

机构：

[1] Colorado Sch Mines, Dept Phys, Ctr Microintegrated Opt Adv Bioimaging & Control, Golden, CO 80401 USA

[2] Univ Calif San Diego, Dept Phys, La Jolla, CA 92093 USA

[3] Kapteyn Murnane Labs Inc, Boulder, CO 80301 USA

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 17期

关键词：

FABRICATION; ABLATION; GLASS;

D O I：

10.1364/OE.18.018086

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (similar to 1 mm) features with parallel sidewalls are ablated at high material removal rates (25 mu m(3) per 80 mu J pulse) at 0.04-0.05 NA. This technique is applied to the fabrication of microfluidic devices by ablation through the back surface of thick (6 mm) fused silica substrates. It is also used to ablate bone under aqueous immersion to produce craniotomies. (C) 2010 Optical Society of America

引用

页码：18086 / 18094

页数：9

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