Optical and electrical properties of ultrathin transparent nanocrystalline boron-doped diamond electrodes

被引:50
|
作者
Sobaszek, M. [1 ]
Skowronski, L. [2 ]
Bogdanowicz, R. [1 ]
Siuzdak, K. [3 ]
Cirocka, A. [4 ]
Zieba, P. [4 ]
Gnyba, M. [1 ]
Naparty, M. [2 ]
Golunski, L. [1 ]
Plotka, P. [5 ]
机构
[1] Gdansk Univ Technol, Fac Elect Telecommun & Informat, Dept Metrol & Optoelect, PL-80233 Gdansk, Poland
[2] Univ Technol & Life Sci, Inst Math & Phys, PL-85789 Bydgoszcz, Poland
[3] Polish Acad Sci, Szewalski Inst Fluid Flow Machinery, Ctr Plasma & Laser Engn, PL-80231 Gdansk, Poland
[4] Univ Gdansk, Fac Chem, Dept Analyt Chem, PL-80308 Gdansk, Poland
[5] Gdansk Univ Technol, Fac Elect Telecommun & Informat, Dept Microelect Syst, PL-80233 Gdansk, Poland
关键词
Microwave plasma chemical vapour deposition; Boron-doped diamond films; Optical constants; Spectroscopic ellipsometry; Cyclic voltammetry; THIN-FILMS; ELECTROCHEMICAL PROPERTIES; CVD DIAMOND; SPECTROSCOPIC ELLIPSOMETRY; CARBON; RAMAN; OXIDATION; GROWTH; POLYCRYSTALLINE; SEMICONDUCTOR;
D O I
10.1016/j.optmat.2014.12.014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The optical properties of ultrathin (less than 100 nm) boron-doped nanocrystalline diamond (B-NCD) film were investigated in a wavelength range of 200-20,000 nm. The B-NCD refractive index showed values close to that of monocrystalline diamond (n = 2.45) in a broad wavelength range (450-4000 nm). A transmittance up to 70% and the average film thickness of 70 urn were achieved. A special cone-shaped shim was used in the deposition process. Ultrathin nanocrystalline films were deposited on silicon substrates using the Microwave Plasma Assisted Chemical Vapour Deposition (MW PA CVD) method. Cyclic voltammetry (CV) measurements in aqueous media consisting of 5 mM K-3[Fe(CN)(6)] in 0.1 M Na2SO4 demonstrated a width of the electrochemical window up to 2.5 V. The evolution of the surface morphology was analysed using a scanning electron microscope (SEM) and an atomic force microscope (AFM). The chemical composition of B-NCD films was examined with micro-Raman Spectroscopy. The Raman spectra included a diamond peak and a nanocrystalline diamond band at 1330-1333 cm(-1) and 1126-1143 cm(-1), respectively. The thickness and optical properties of ultrathin B-NCD film in UV-MIR wavelength range were investigated using spectroscopic ellipsometry. (C) 2014 Elsevier B.V. All rights reserved.
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页码:24 / 34
页数:11
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