Real-time phase step measurement using the volume enclosed by a surface algorithm in self-calibrating phase-shifting interferometry

被引:0
|
作者
Carlos Gomez-Conde, Juan [1 ]
Meneses-Fabian, Cruz [1 ]
机构
[1] Benemerita Univ Autonoma Puebla, Fac Ciencias Fisicomatemat, Lab Luz Estructurada, Av San Claudio & 18 Sur,Apdo Postal 165, Puebla 72570, Pue, Mexico
关键词
Interferometry; Phase step; Real-time; Dynamic interferogram; REFRACTIVE-INDEX; EXTRACTION; THICKNESS; PLATES;
D O I
10.1016/j.measurement.2019.107412
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This manuscript presents a simple, and very efficient method capable of measuring in real-time the phase steps from an interferogram varying with the time. Within a range (0, 2 pi) given by the phase steps of two fixed reference interferograms. The phase differences among the dynamic and reference interferograms are computed by an algorithm of type self-calibrating generalized phase-sifting interferometry based on geometric concept of volume enclosed by a surface. This proposal has the property to accept or reject the measured data, and its calibration process is very easy, which are very important advantages, so it is a very practical method. Theoretical model is described, verified with a numerical simulation, and applied to measure experimentally the phase steps in three optical tables with different conditions. (C) 2019 Elsevier Ltd. All rights reserved.
引用
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页数:9
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