A Transport and Reaction Model for Simulating Cluster Secondary Ion Mass Spectrometry Depth Profiles of Organic Solids

被引：6
|
作者：
Tuccitto, Nunzio [1 ]
Zappala, Gabriella
Vitale, Stefania
Torrisi, Alberto
Licciardello, Antonino
机构：
[1] Univ Catania, Dept Chem Sci, Viale A Doria 6, I-95125 Catania, Italy
来源：
JOURNAL OF PHYSICAL CHEMISTRY C | 2016年 / 120卷 / 17期
关键词：
DIFFUSION-APPROXIMATION; ATOMIC REDISTRIBUTION; MOLECULAR-DYNAMICS; CROSS-LINKING; BOMBARDMENT; C-60; FILMS;
D O I：
10.1021/acs.jpcc.6b01532
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The continuum equation is used for modeling erosion rate, ion beam induced mixing, and reactions during the sputtering process involved in secondary ion mass spectrometry experiments. We developed a new approach that is able to incorporate the beam induced reactivity, so leading to a reasonable simulation of depth profiles of polymers and organic solids. The model allows one to include the effects of the reactive gas dosing on sputtering yield and damage accumulation during profiling. Comparison with experimental data confirms the quality of the model and strengthens the proposed approach.
引用
收藏
页码：9263 / 9269
页数：7
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