MEMS three-dimensional scan mirror

被引：3

作者：

Shao, YH ^{[1
]}

Dickensheets, DL ^{[1
]}

机构：

[1] Montana State Univ, Dept Elect & Comp Engn, Bozeman, MT 59717 USA

来源：

MOEMS DISPLAY AND IMAGING SYSTEMS II | 2004年 / 5348卷

关键词：

3D scan mirror; MEMS; microfabrication; deformable membrane; optical scanning systems; miniature confocal microscope;

D O I：

10.1117/12.523902

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 1500-mum-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a three-dimensional space with a single optical surface, and is referred as a 3D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. In this paper we describe the 3D scan mirror design, fabrication and characterization as well as its target application.

引用

页码：175 / 183

页数：9

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