Physical modeling of shallow/deep junctions

被引：0
|
作者：
Rafferty, C [1 ]
机构：
[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
来源：
CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY | 1998年 / 449卷
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Predicting impurity profiles after diffusion is a key step in process design for deep submicron integrated circuits. Recent technology trends give rise to strong anomalous diffusion effects arising from implantation damage. Present models describe such effects at high energy but require improvement for shallow implants.
引用
收藏
页码：91 / 94
页数：4
相关论文
共 50 条
  • [31] SHALLOW JUNCTIONS AND THEIR IMPACT ON ULSI DEVICES
    CHAM, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (03) : C119 - C119
  • [32] Nickel silicide formation on shallow junctions
    Jiang, YL
    Agarwal, A
    Ru, GP
    Cai, G
    Li, BZ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 237 (1-2): : 160 - 166
  • [33] THE EFFECTS OF RAPID THERMAL-PROCESSING ON ULTRA-SHALLOW JUNCTIONS FOR DEEP-SUBMICRON MOSFETS
    LIU, R
    LU, CY
    SUNG, JJ
    PAI, CS
    TSAI, NS
    SOLID-STATE ELECTRONICS, 1995, 38 (08) : 1473 - 1477
  • [34] Shallow2Deep: Indoor scene modeling by single image understanding
    Nie, Yinyu
    Guo, Shihui
    Chang, Jian
    Han, Xiaoguang
    Huang, Jiahui
    Hu, Shi-Min
    Zhang, Jian Jun
    PATTERN RECOGNITION, 2020, 103
  • [35] Hydrodynamic Modeling of Fast Semi-Submersible Vehicle in Deep and Shallow Water
    Matveev, Konstantin, I
    2022 OCEANS HAMPTON ROADS, 2022,
  • [36] Physical insight into ultra-shallow junction formation through atomistic modeling
    Pelaz, L.
    Aboy, M.
    Lopez, P.
    Marques, L. A.
    Santos, I.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 253 (1-2): : 41 - 45
  • [37] Physical and numerical modeling of cyclic moment-rotation behavior of shallow foundations
    Gajan, Sivapalan
    Kutter, Bruce L.
    Thomas, Jeremy M.
    Proceedings of the 16th International Conference on Soil Mechanics and Geotechnical Engineering, Vols 1-5: GEOTECHNOLOGY IN HARMONY WITH THE GLOBAL ENVIRONMENT, 2005, : 795 - 798
  • [38] Shallow and deep water global ocean tides from altimetry and numerical modeling
    Tierney, CC
    Kantha, LH
    Born, GH
    JOURNAL OF GEOPHYSICAL RESEARCH-OCEANS, 2000, 105 (C5) : 11259 - 11277
  • [39] Physical and numerical modeling of rainfall triggered shallow landslides in central highlands, Ethiopia
    Biruk Gissila Gidday
    R. Ayothiraman
    B. Janaki Ramaiah
    G. V. Ramana
    Bulletin of Engineering Geology and the Environment, 2023, 82
  • [40] Physical and numerical modeling of rainfall triggered shallow landslides in central highlands, Ethiopia
    Gidday, Biruk Gissila
    Ayothiraman, R.
    Ramaiah, B. Janaki
    Ramana, G. V.
    BULLETIN OF ENGINEERING GEOLOGY AND THE ENVIRONMENT, 2023, 82 (07)
12345