共 50 条
- [1] Carbon Film in Radio Frequency Surface Plasma Source with Cesiation SIXTH INTERNATIONAL SYMPOSIUM ON NEGATIVE IONS, BEAMS AND SOURCES (NIBS 2018), 2018, 2052
- [2] Efficient cesiation in RF driven surface plasma negative ion source REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (02):
- [3] AN RF PLASMA BEAM SOURCE FOR THIN-FILM AND SURFACE TECHNOLOGY PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 1017 - 1024
- [4] Cesiation in highly efficient surface plasma sources PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS, 2011, 14 (05):
- [5] Development of inductively-coupled RF plasma source for carbon alignment film deposition IDW '07: PROCEEDINGS OF THE 14TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2007, : 541 - +
- [6] Amorphous carbon nitride film prepared by RF plasma CVD Weixi Jiagong Jishu/Microfabrication Technology, 1996, (03): : 49 - 54
- [7] Volume and surface rf power absorption in a helicon plasma source PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (03): : 474 - 491
- [8] Volume and surface rf power absorption in a helicon plasma source Plasma Sources Sci Technol, 3 (474-491):
- [10] Surface modification of polyethylene film by RF-Ar plasma treatment Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2012, 32 (07): : 545 - 549