Well-aligned carbon nitride nanotubes synthesized in anodic alumina by electron cyclotron resonance chemical vapor deposition

被引:152
|
作者
Sung, SL [1 ]
Tsai, SH [1 ]
Tseng, CH [1 ]
Chiang, FK [1 ]
Liu, XW [1 ]
Shih, HC [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
关键词
D O I
10.1063/1.123291
中图分类号
O59 [应用物理学];
学科分类号
摘要
Vertically aligned carbon nitride nanotubes with a uniform diameter of about 250 nm have been synthesized on a porous alumina membrane template (50-80 mu m thick) in a microwave excited plasma of C2H2 and N-2 using an electron cyclotron resonance chemical vapor deposition system. A negative dc bias voltage was applied to the substrate holder of graphite to promote the flow of ionic fluxes through the nanochannels of the alumina template. This allowed the physical, and subsequent chemical, absorption of species on the walls of the nanochannels that resulted in the formation of the carbon nitride nanotubes. The hollow structure and vertically aligned properties of the nanotubes have been clearly verified by field-emission scanning electron microscope images. The absorption band between 1250 and 1750 cm(-1) in the Fourier transform infrared spectroscopy spectrum proves that nitrogen atoms have been incorporated into an amorphous network of carbon. (C) 1999 American Institute of Physics. [S0003-6951(99)03102-2].
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收藏
页码:197 / 199
页数:3
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