Hybrid Micro-Technologies for Medical Applications

Medical applications have long provided an impetus for research in silicon-based microsystems. This paper explores micro-technologies that complement and extend conventional manufacturing approaches and applications. For example, lithographic microfabrication methods can be used to fabricate stents and integrated microsensors that can monitor lumen patency in cardiac and biliary applications. These methods can also be extended to the fabrication of ceramic-based piezoelectric transducers. One potential application is to provide tissue density measurements at the tip of a biopsy needle. Piezo-thermal elements may additionally provide the means for precise cauterization and tissue ablation. Other examples of hybrid micro-technologies are also provided.