Signal transmission from individual mammalian nerve cell to field-effect transistor

The possibility of the local transistor recording of individual mammalian neurons with EOS transistor that have a sufficiently low noise was analyzed. Si epi-wafers with a weakly n-doped epi-layer were n-doped by implantation of phosphorus to obtain a retrograde bulk doping. A 340 -nm-thick SiO2 was deposited by CVD and densified by rapid thermal annealing to 328 nm. Oxide was structured photolithographycally by fluoric acid etching to expose the designated source and drain areas. The oxide was completely removed with buffered HF, the wafer was cleaned using RCA method. For recording chips were taken from the incubator, searched for suitable cells and connected to amplifier. It was observed that for an elucidation of neural code, the relation between network function and activity of individual cells, there is need of methods for simultaneously observing the great number of neuron in large nets for extended time intervals.