Vision-based teleoperation of a stroboscopic microscopic interferometric system for remote dynamic MEMS testing

被引：0
|
作者：
Garmire, D [1 ]
Muller, RS [1 ]
Demmel, J [1 ]
机构：
[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
来源：
IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications | 2005年
关键词：
D O I：
10.1109/OMEMS.2005.1540129
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate a system that automatically locates MEMS structures under a microscope equipped with a 3 DOF stage. It correlates images directly with the chip-mask layout and is especially useful for teleoperated experiments.
引用
收藏
页码：163 / 164
页数：2
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