共 50 条
- [28] Production of fluorine-containing molecular species in plasma-generated atomic F flows JOURNAL OF PHYSICAL CHEMISTRY A, 2003, 107 (39): : 7775 - 7782
- [30] Absolute concentrations of reactive species in etching plasmas by high-sensitivity UV absorption spectroscopy INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL V, PROCEEDINGS, 1999, : 33 - 34