High-Speed Focus Inspection System Using a Position-Sensitive Detector

被引:10
|
作者
Cao, Binh Xuan [1 ,2 ]
Le Hoang, Phuong [3 ]
Ahn, Sanghoon [1 ]
Kang, Heeshin [1 ]
Kim, Jengo [1 ]
Noh, Jiwhan [1 ,2 ]
机构
[1] KIMM, Dept Laser & Electron Beam Applicat, Daejeon 34103, South Korea
[2] Korea Univ Sci & Technol UST, Dept Nanomechatron, Daejeon 34113, South Korea
[3] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Daejeon 34141, South Korea
关键词
focal position detection; laser micromachining; CCD camera; single-slit masks; position-sensitive detector; AUTOFOCUSING MICROSCOPE; DESIGN;
D O I
10.3390/s17122842
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.
引用
收藏
页数:11
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