Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance

被引：5
|
作者：
Wei, HZ [1 ]
Yu, JZ
Liu, ZL
Zhang, XF
Shi, W
Fang, CS
机构：
[1] Chinese Acad Sci, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Ctr Microelect, Inst Semicond, Beijing 100083, Peoples R China
[3] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2001年 / 18卷 / 02期
关键词：
D O I：
10.1088/0256-307X/18/2/331
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We demonstrate a type of 2 x 2 multimode interference 3 dB coupler based on silicon-on-insulator. The fabrication tolerance was investigated by the effective index method and the guide mode method. The devices with different lengths were fabricated and near-held output images were obtained. Tolerances to width, length and etch depth are 2, 200 and 2 mum, respectively. The devices show a uniform power distribution.
引用
收藏
页码：245 / 247
页数：3
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