Ferroelectric field-effect transistor based on transparent oxides

被引:10
|
作者
Titkov, Ilya [1 ]
Pronin, Igor [1 ]
Delimova, Lubov [1 ]
Liniichuk, Ivan [1 ]
Grekhov, Igor [1 ]
机构
[1] Ioffe Inst RAS, Dept Solid State Elect, St Petersburg 194021, Russia
基金
俄罗斯基础研究基金会;
关键词
transparent ferroelectric field-effect transistor; Single-crystal tin dioxide; Clockwise hysteresis; Intergrain boundaries;
D O I
10.1016/j.tsf.2007.03.114
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We studied a PbxZr1-xTiO3/SnO2/Al(2)O(3)heterostructure as a base for transparent ferroclectric field-effect transistor. Single-crystal SnO2/Al2O3 epitaxial films with the electron mobility of 25 cm(2)/N were grown by pulsed laser deposition using two YAG:Nd lasers. Depletion mode transistor Au/PZT/SnO2/Al2O3 was produced by laser ablation and RF sputtering. All the samples demonstrate clock-wise hysteresis of the source-drain characteristic. The energy distribution of traps at the PZT/SnO, interface was determined using a modified version of a transient current method. The effect of PZT intergrain boundaries on the retention time was taken into account for experimental data discussion. (c) 2007 Elsevier B.V All rights reserved.
引用
收藏
页码:8748 / 8751
页数:4
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