Fabrication and Analysis of a MEMS NIR Fabry-Perot Interferometer

被引：8
|
作者：
Russin, Timothy J. [1 ]
Kerber, Maxwell [1 ]
Russin, Alicia [1 ]
Wang, Andrew [1 ]
Waters, Richard [1 ]
机构：
[1] Space & Naval Warfare Syst Ctr Pacific, Adv Integrated Circuit Technol Branch, San Diego, CA 92110 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2012年 / 21卷 / 01期
关键词：
Fabry-Perot interferometers; Raman spectroscopy; tunable filters; COLORIMETRIC SENSOR ARRAY; CHEMICAL SENSORS; FILTERS; WIRES;
D O I：
10.1109/JMEMS.2011.2174413
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report the design and fabrication of a tunable MEMS Fabry-Perot etalon for use in microscale spectroscopic applications. The reflective elements of the interferometer are dielectric mirror stacks optimized for 1500-nm light and the tunability arises via capacitive attraction of a translatablemirror on a spring. The mirror reflectivity was measured to be 97.3%, corresponding to a calculated finesse of 115, while the measured linewidth and FSR are 70 cm(-1) and 334 cm(-1), respectively, corresponding to a measured finesse of 5. [2011-0027]
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页码：181 / 189
页数：9
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