A novel piezoelectric interdigital transducer for the excitation of high frequency surface acoustic waves

被引:0
|
作者
Daniau, W [1 ]
Kumar, AKS [1 ]
Paruch, P [1 ]
Marré, D [1 ]
Triscone, JM [1 ]
Ballandras, S [1 ]
机构
[1] CNRS, Inst FEMTO ST, UMR 6174, Dept LPMO, F-25044 Besancon, France
关键词
ferroelectries; surface acoustic waves (SAW); poled domain; AFM; piezoresponse; piezoelectric inter-digital transducer (PIT); epitaxial PZT layer;
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
We propose a novel piezoelectric inter-digital transducer (PIT) based on alternately poled domains of a ferroelectric thin film deposited on top of a single crystal substrate. This transducer offers an alternative to the inter-digital transducer (IDT) for the excitation of very high frequency surface acoustic waves (SAW). An experimental validation of the approach is reported in a 1-4 GHz frequency range, confirming theoretical predictions.
引用
收藏
页码:441 / 444
页数:4
相关论文
共 50 条
  • [31] An approximate analysis of waves in layered piezoelectric plates from an interdigital source transducer
    Ogilvy, JA
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (03) : 876 - 884
  • [32] Single interdigital transducer as surface acoustic wave impedance sensor
    Nguyen, V. H.
    Richert, S.
    Park, H.
    Boeker, A.
    Schnakenberg, U.
    [J]. BIOSENSORS 2016, 2017, 27 : 70 - 71
  • [34] Characterization of micrometric and superficial residual stresses using high frequency surface acoustic waves generated by interdigital transducers
    Duquennoy, Marc
    Ouaftouh, Mohammadi
    Deboucq, Julien
    Lefebvre, Jean-Etienne
    Jenot, Frederic
    Ourak, Mohamed
    [J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2013, 134 (06): : 4360 - 4371
  • [35] Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope
    Wang, Wen
    Oh, Haekwan
    Lee, Keekeun
    Yoon, Sungjin
    Yang, Sangsik
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (06) : 06FK091 - 06FK098
  • [36] EXCITATION OF ELECTROACOUSTIC SURFACE-WAVES BY INTERDIGITAL TRANSDUCERS
    GORYSHNIK, LL
    KONDRATE.SN
    [J]. RADIOTEKHNIKA I ELEKTRONIKA, 1974, 19 (08): : 1719 - 1728
  • [37] INTERDIGITAL EXCITATION OF SURFACE-WAVES ON BASAL PLANE OF A SEMI-INFINITE, HEXAGONAL, PIEZOELECTRIC CRYSTAL
    QUAK, D
    [J]. WAVE ELECTRONICS, 1977, 3 (02): : 107 - 123
  • [38] EXCITATION AND AMPLIFICATION OF SURFACE ACOUSTIC WAVES IN SEMICONDUCTOR-PIEZOELECTRIC FILM STRUCTURES
    GULYAEV, YV
    KMITA, AM
    KOTELYAN.IM
    MEDVED, AV
    TURSUNOV, SS
    [J]. SOVIET PHYSICS SEMICONDUCTORS-USSR, 1971, 5 (01): : 66 - &
  • [39] NONUNIFORM INTERDIGITAL TRANSDUCERS FOR ACOUSTIC SURFACE-WAVES
    MORGAN, DP
    NISHIKAW.K
    [J]. NEC RESEARCH & DEVELOPMENT, 1973, (28): : 1 - 13
  • [40] ANGULAR INTERDIGITAL TRANSDUCERS OF ACOUSTIC SURFACE-WAVES
    SINITSA, VN
    BASOV, VG
    CHIRKIN, NM
    [J]. RADIOTEKHNIKA I ELEKTRONIKA, 1975, 20 (04): : 705 - 707