A novel piezoelectric interdigital transducer for the excitation of high frequency surface acoustic waves

被引:0
|
作者
Daniau, W [1 ]
Kumar, AKS [1 ]
Paruch, P [1 ]
Marré, D [1 ]
Triscone, JM [1 ]
Ballandras, S [1 ]
机构
[1] CNRS, Inst FEMTO ST, UMR 6174, Dept LPMO, F-25044 Besancon, France
关键词
ferroelectries; surface acoustic waves (SAW); poled domain; AFM; piezoresponse; piezoelectric inter-digital transducer (PIT); epitaxial PZT layer;
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
We propose a novel piezoelectric inter-digital transducer (PIT) based on alternately poled domains of a ferroelectric thin film deposited on top of a single crystal substrate. This transducer offers an alternative to the inter-digital transducer (IDT) for the excitation of very high frequency surface acoustic waves (SAW). An experimental validation of the approach is reported in a 1-4 GHz frequency range, confirming theoretical predictions.
引用
收藏
页码:441 / 444
页数:4
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