Fully Printed Flexible Humidity Sensor

被引:93
|
作者
Reddy, A. S. G. [1 ]
Narakathu, B. B. [1 ]
Atashbar, M. Z. [1 ,2 ]
Rebros, M. [2 ]
Rebrosova, E. [2 ]
Joyce, M. K. [2 ]
机构
[1] Western Michigan Univ, Dept Elect & Comp Engn, Kalamazoo, MI 49008 USA
[2] Western Michigan Univ, Ctr Adv Printed Elect, Kalamazoo, MI 49008 USA
来源
EUROSENSORS XXV | 2011年 / 25卷
关键词
capacitive humidity sensor; gravure printing; polymer printing; printed electronics; printed sensor; FABRICATION; TRANSISTORS;
D O I
10.1016/j.proeng.2011.12.030
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A humidity sensor that employs interdigitated capacitors (IDC) printed with silver (Ag) nanoparticle based ink on a flexible poly ethylene terephthalate (PET) substrate was successfully fabricated using gravure printing process. Thicknesses of 1 mu m and 500 mu m of a humidity sensitive polymer poly (2-hydroxyethyl methacrylate) (pHEMA) was deposited on the IDCs by means of gravure printing. The capacitive response of the sensor towards relative humidity (RH) was measured in the range of 30% RH to 80% RH; the maximum percentage change in capacitance was 172 % at 80% RH when compared to base capacitance at 30% RH. The humidity response of the printed sensor revealed a very high stability with a maximum error of 0.6 % and 0.8 % from the average value at 40% RH and 60% RH, respectively. (C) 2011 Published by Elsevier Ltd.
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页数:4
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