Micromechanics predictions of effective elastic, piezoelectric and dielectric properties of composite piezoelectric films

被引：3

作者：

Li, Liwenjuan ^{[1
,2
]}

Gu, Xiyu ^{[2
]}

Gao, Chao ^{[2
]}

Hu, Shaohua ^{[3
]}

Wang, Yaxin ^{[2
]}

Zou, Yang ^{[2
]}

Liu, Yan ^{[2
]}

Liu, Wenjuan ^{[2
,4
]}

Cai, Yao ^{[2
,4
]}

Sun, Chengliang ^{[2
,4
]}

机构：

[1] Wuhan Univ, Hongyi Honor Coll, Wuhan 430072, Peoples R China

[2] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China

[3] Wuhan Univ, Elect Informat Sch, Wuhan 430072, Peoples R China

[4] Hubei Yangtze Memory Labs, Wuhan 430205, Peoples R China

来源：

APPLIED PHYSICS EXPRESS | 2022年 / 15卷 / 09期

关键词：

ScAlN; AlN composite film; EMT micromechanics theory; reuss model; electro-elastic modulus matrix; FBARs; FEM simulation; RESONATORS; INCLUSION; ENERGY; MODULI;

D O I：

10.35848/1882-0786/ac8bc3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Knowledge of the effective elastic, piezoelectric and dielectric properties facilitates the design of radio frequency devices, for example film bulk acoustic resonators (FBARs). Based on the Reuss model and Eshelby-Mori-Tanaka micromechanics theory, this paper predicts the effective properties of bilayer composite piezoelectric film consisting of AlN film and vertical compound ScAlN film. The evaluated material coefficients and original material parameters are substituted into the FEM simulation to investigate the performance of FBARs, respectively. The consistent resonant frequencies of FBARs demonstrate the accuracy of Reuss model in calculating the effective parameters of bilayer composite piezoelectric film.

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页数：7

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