Micromechanics predictions of effective elastic, piezoelectric and dielectric properties of composite piezoelectric films

被引：3

作者：

Li, Liwenjuan ^{[1
,2
]}

Gu, Xiyu ^{[2
]}

Gao, Chao ^{[2
]}

Hu, Shaohua ^{[3
]}

Wang, Yaxin ^{[2
]}

Zou, Yang ^{[2
]}

Liu, Yan ^{[2
]}

Liu, Wenjuan ^{[2
,4
]}

Cai, Yao ^{[2
,4
]}

Sun, Chengliang ^{[2
,4
]}

机构：

[1] Wuhan Univ, Hongyi Honor Coll, Wuhan 430072, Peoples R China

[2] Wuhan Univ, Inst Technol Sci, Wuhan 430072, Peoples R China

[3] Wuhan Univ, Elect Informat Sch, Wuhan 430072, Peoples R China

[4] Hubei Yangtze Memory Labs, Wuhan 430205, Peoples R China

来源：

APPLIED PHYSICS EXPRESS | 2022年 / 15卷 / 09期

关键词：

ScAlN; AlN composite film; EMT micromechanics theory; reuss model; electro-elastic modulus matrix; FBARs; FEM simulation; RESONATORS; INCLUSION; ENERGY; MODULI;

D O I：

10.35848/1882-0786/ac8bc3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Knowledge of the effective elastic, piezoelectric and dielectric properties facilitates the design of radio frequency devices, for example film bulk acoustic resonators (FBARs). Based on the Reuss model and Eshelby-Mori-Tanaka micromechanics theory, this paper predicts the effective properties of bilayer composite piezoelectric film consisting of AlN film and vertical compound ScAlN film. The evaluated material coefficients and original material parameters are substituted into the FEM simulation to investigate the performance of FBARs, respectively. The consistent resonant frequencies of FBARs demonstrate the accuracy of Reuss model in calculating the effective parameters of bilayer composite piezoelectric film.

引用

下载

页数：7

共 50 条

[1] MICROMECHANICS PREDICTIONS OF THE EFFECTIVE ELECTROELASTIC MODULI OF PIEZOELECTRIC COMPOSITES
DUNN, ML
TAYA, M
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1993, 30 (02) : 161 - 175
[2] Effective elastic, piezoelectric and dielectric properties of braided fabric composites
Ruan, X
Safari, A
Chou, TW
COMPOSITES PART A-APPLIED SCIENCE AND MANUFACTURING, 1999, 30 (12) : 1435 - 1444
[3] ELASTIC, PIEZOELECTRIC AND DIELECTRIC-PROPERTIES OF COMPOSITE-MATERIALS
YAMAGUCHI, M
HASHIMOTO, KY
KOGO, H
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1987, 34 (03) : 425 - 426
[4] Micromechanics of piezoelectric composites with improved effective piezoelectric constant
Ray M.C.
International Journal of Mechanics and Materials in Design, 2006, 3 (04) : 361 - 371
[5] Effective dielectric and elastic constants of piezoelectric polycrystals
1600, (71):
[6] Micromechanics-based prediction of the effective properties of piezoelectric composite having interfacial imperfections
Lee, Sangryun
Jung, Jiyoung
Ryu, Seunghwa
COMPOSITE STRUCTURES, 2020, 240
[7] Micromechanics-based prediction of the effective properties of piezoelectric composite having interfacial imperfections
Lee, Sangryun
Jung, Jiyoung
Ryu, Seunghwa
Ryu, Seunghwa (ryush@kaist.ac.kr), 1600, Elsevier Ltd (240):
[8] Piezoelectric and dielectric properties of collagen films
Góes, J.C.
Figueiró, S.D.
De Paiva, J.A.C.
Sombra, A.S.B.
Physica Status Solidi (A) Applied Research, 1999, 176 (02): : 1077 - 1083
[9] Piezoelectric and dielectric properties of collagen films
Góes, JC
Figueiró, SD
de Paiva, JAC
Sombra, ASB
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1999, 176 (02): : 1077 - 1083
[10] Shear lag micromechanics model for effective properties of piezoelectric composites
Mallik, N
AIAA JOURNAL, 2005, 43 (12) : 2617 - 2623

← 1 2 3 4 5 →