Ultrasonic spray pyrolysis deposition of TiO2 films

TiO2 films were successfully deposited on glass substrates using ultrasonic spray pyrolysis method. Tiny fog droplets including reactant produced by ultrasonic nebulizer unit were sprayed on pre-heated glass substrates. Then, pyrolysis of reactant will happen and thin films will be deposited on the glass. Ti (SO4)(2) was used as reactant. Methanol was used as solvent. Several deposition condition such as concentration, temperature and deposition time were optimized for obtaining compact and uniform thin films. The crystal structure and surface morphology were characterized by XRD and AFM. The results show that the crystal structures of films are polycrystalline TiO2 anatase phase. The preferred orientation is (101).