TiO2 thin films synthesized by the spray pyrolysis deposition (SPD) technique

被引：58

作者：

Okuya, M ^{[1
]}

Prokudina, NA ^{[1
]}

Mushika, K ^{[1
]}

Kaneko, S ^{[1
]}

机构：

[1] Shizuoka Univ, Dept Mat Sci & Technol, Hamamatsu, Shizuoka 4328561, Japan

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

films; electron microscopy; grain size; optical property; TiO2;

D O I：

10.1016/S0955-2219(98)00341-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Anatase-type TiO2 thin films with high transmittance (>70%) in the visible region were successfully synthesized on glass substrates by the spray pyrolysis deposition (SPD) technique. Two kinds of starting solutions, TiCl4 ethanol solution and Ti(i-OC3H7)(4) 2-propanol solution with TiCl4 as an additive were prepared separately. The TiO2 thin film obtained from the former solution showed the preferred orientation along the [101] direction. However, a 1.5 mu m thick film from the latter solution revealed almost the same transmittance as a 200 nm thick film from the former. The result indicates that the complexes produced by adding TiCl4 in Ti(i-OC3H7)(4) 2-propanol solution plays an important role in the mechanism of the crystallization of TiO2. (C) 1999 Elsevier Science Limited. All rights reserved.

引用

页码：903 / 906

页数：4

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