Development of SF6 decomposition gas sensor

被引:20
|
作者
Minagawa, T [1 ]
Kawada, M [1 ]
Yamauchi, S [1 ]
Kamei, M [1 ]
Nishida, C [1 ]
机构
[1] Mitsubishi Electr Corp, Amagasaki, Hyogo, Japan
来源
关键词
solid electrolytes; thin films; sputtering; sandblasting; scanning electron microscopy (SEM);
D O I
10.1016/S0257-8972(03)00095-1
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Gas sensors for detecting SF6 decomposition products have been pursued as low-cost instrumentation for detecting and locating faults in gas-insulated switch-ear (GIS). We have developed an amperometric solid-state ionic sensor using fluorine ion-conductive solid electrolyte. In order to improve its sensitivity, the surfaces of the electrolyte are roughened by sandblasting, and are covered with the gas permeable Au electrodes. The roughness of the surfaces and the thickness of the electrodes are optimized. It has been confirmed that the sensor responds promptly to 1 ppm HF gas at room temperature, and returns to its original level once the HF gas is removed. (C) 2003 Elsevier Science B.V. All rights reserved.
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页码:643 / 645
页数:3
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