A Gaussian-shaped AT-cut quartz crystal resonator

被引：11

作者：

Abe, Takashi ^{[1
]}

Kishi, Hiroki ^{[1
]}

机构：

[1] Niigata Univ, Grad Sch Sci & Technol, Niigata 95021, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 166卷 / 02期

关键词：

Quartz crystal resonator; DRIE; 3D; Etch selectivity; QCM;

D O I：

10.1016/j.sna.2010.04.005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：173 / 176

页数：4

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