This paper demonstrates the characterization of femtosecond laser filamentation in soda-lime glass. We achieved femtosecond pulse filamentation of variable height and width by focusing the femtosecond laser beam in different layers inside the sample glass. The dielectric medium immediately before the target position increases the effective numerical aperture of the objective lens that causes the elongation of focal length of the laser beam in a tiny focal spot with high power density. As a result, high aspect ratio voids are engraved inside the glass samples. Furthermore, we investigate the characteristics of the fabricated voids and their dependence on the irradiation conditions of the laser beam and associated optical setup. The height and width of the voids are controlled by varying the laser power, numerical aperture & magnification of the objective lens, and width of the dielectric medium before laser focusing position. Using high power femtosecond laser pulse filaments, we fabricated very long voids inside the glass sample, which undergoes cleaving process with uniform mechanical pressure for smooth cutting of the glass substrate.
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Vilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, LithuaniaVilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
Macernyte, Lina
Skruibis, Julius
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Vilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, LithuaniaVilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
Skruibis, Julius
Vaicaitis, Virgilijus
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Vilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, LithuaniaVilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
Vaicaitis, Virgilijus
Sirutkaitis, Romualdas
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Vilnius Univ, Inst Biochem, Mokslininku Str 12A, LT-08662 Vilnius, LithuaniaVilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
Sirutkaitis, Romualdas
Balachninaite, Ona
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Vilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, LithuaniaVilnius Univ, Laser Res Ctr, Sauletekio Ave 10, LT-10223 Vilnius, Lithuania
机构:
Univ Santiago de Compostela, Fac Phys, Dept Appl Phys, Microopt & GRIN Opt Grp, E-15782 Santiago De Compostela, SpainUniv Santiago de Compostela, Fac Phys, Dept Appl Phys, Microopt & GRIN Opt Grp, E-15782 Santiago De Compostela, Spain
Delgado, Tamara
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Nieto, Daniel
Teresa Flores-Arias, Maria
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Univ Santiago de Compostela, Fac Phys, Dept Appl Phys, Microopt & GRIN Opt Grp, E-15782 Santiago De Compostela, SpainUniv Santiago de Compostela, Fac Phys, Dept Appl Phys, Microopt & GRIN Opt Grp, E-15782 Santiago De Compostela, Spain
机构:
State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Huang, Yichen
Zhang, Zihao
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State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Zhang, Zihao
Wang, Xu
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State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Wang, Xu
Li, Liqun
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State Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Li, Liqun
Yang, Lijun
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School of Mechatronics Engineering, Harbin Institute of Technology, Harbin,150001, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Yang, Lijun
Li, Mingyu
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School of Integrated Circuit, Harbin Institute of Technology, Shenzhen,518055, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
Li, Mingyu
Zhu, Wenbo
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School of Integrated Circuit, Harbin Institute of Technology, Shenzhen,518055, ChinaState Key Laboratory of Precision Welding & Joining of Materials and Structures, Harbin Institute of Technology, Harbin,150001, China
机构:
Univ Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, FranceUniv Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, France
Ouchene, Anis
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Mollon, Guilhem
Ollivier, Maelig
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Univ Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, FranceUniv Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, France
Ollivier, Maelig
Sedao, Xxx
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机构:
Univ Lyon, Univ Jean Monnet, Lab Hubert Curien, UMR 5516, F-42000 St Etienne, France
MANUTECH USD, 20 rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, France
Sedao, Xxx
Pascale-Hamri, Alina
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MANUTECH USD, 20 rue Prof Benoit Lauras, F-42000 St Etienne, FranceUniv Lyon, Ctr SPIN, Mines St Etienne, UMR LGF 5307, F-42023 St Etienne, France