Numerical modeling of dust particle configurations in a cylindrical radio-frequency plasma reactor

被引:9
|
作者
Davoudabadi, M. [1 ]
Mashayek, F. [1 ]
机构
[1] Univ Illinois, Dept Mech & Ind Engn, Chicago, IL 60607 USA
来源
PHYSICAL REVIEW E | 2007年 / 76卷 / 05期
关键词
D O I
10.1103/PhysRevE.76.056405
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In the present work, first, plasma phase variables in a cylindrical radio-frequency (rf) plasma reactor are numerically solved using the local field approximation model. Then, equilibrium configurations of a few interacting (sub-)micron-sized dust particles are obtained by integrating the particles equations for their motion and charge, accounting for the various forces acting on each particle in a three-dimensional Lagrangian framework. Direct comparison of the results with experiment demonstrates excellent qualitative agreement. Based on the ion focus phenomenon, a physical model is formulated and proven successful in simulating the vertically aligned structures.
引用
收藏
页数:12
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