Micro-displacement measurements with holographic gratings

被引：2
|
作者：
Gómez-Colín, MR [1 ]
Olivares-Pérez, A [1 ]
Sánchez-Villicaña, V [1 ]
机构：
[1] Inst Nacl Astrofis Opt & Elect, Puebla 72840, Mexico
来源：
PRACTICAL HOLOGRAPHY XV AND HOLOGRAPHIC MATERIALS VII | 2001年 / 4296卷
关键词：
holography; metrology; gratings;
D O I：
10.1117/12.429448
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nowadays micro-displacement systems are quite common. In this work we propose a new technique to measure micro displacements using high frequency holographic gratings. In this technique the grating is place on the object carrying out the micro displacement. The small displacements are measured by counting the number of displace fringes of an amplified grating image as the micro-displacement takes place. The main advantage of the system we have designed is the accuracy of its measurements, which can easily be adjusted by changes in the grating frequency.
引用
收藏
页码：108 / 115
页数：8
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