Novel high Q-factor resonant microsensor platform for chemical and biological applications

被引：0
|
作者：
Seo, JH [1 ]
Brand, O [1 ]
机构：
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
来源：
TRANSDUCERS '05, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2005年
关键词：
resonant sensor; quality factor; chemical sensor; mass-sensitive sensor;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A novel resonant microsensor platform for chemical and biological sensing applications in gaseous and liquid environment is reported. To achieve a high quality factor, the disk-shape microstructure is operated in a rotational in-plane mode with typical resonance frequencies between 300 and 700 kHz. The resonators feature electrothermal excitation elements and a piezoresistive Wheatstone bridge for detection, sensitive only to the inplane rotational vibration mode. Resonant microsensors with different dimensions have been fabricated and extensively characterized, achieving quality factors up to 5800 in air. Preliminary tests performed in water after parylene coating show a Q-factor of approx. 100.
引用
收藏
页码：593 / 596
页数：4
相关论文
共 50 条
  • [1] High Q-factor in-plane-mode resonant microsensor platform for gaseous/liquid environment
    Seo, Jae Hyeong
    Brand, Oliver
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 17 (02) : 483 - 493
  • [2] High and stable Q-factor in resonant MEMS with getter film
    Conte, A.
    Moraja, M.
    Longoni, G.
    Fourrier, A.
    [J]. RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/ MOEMS V, 2006, 6111
  • [3] DETERMINATION OF Q-FACTOR OF AN ELEMENT IN RESONANT NETWORKS
    MORAWSKI, T
    [J]. BULLETIN DE L ACADEMIE POLONAISE DES SCIENCES-SERIE DES SCIENCES TECHNIQUES, 1972, 20 (06): : 451 - &
  • [4] HIGH FREQUENCY PULSE RESPONSE IN A LOW Q-FACTOR RESONANT AMPLIFIER
    SMOLINSKI, AK
    [J]. BULLETIN DE L ACADEMIE POLONAISE DES SCIENCES-SERIE DES SCIENCES TECHNIQUES, 1966, 14 (10): : 1017 - +
  • [5] A Novel High Q-factor Structure of Digitally Tunable Capacitor for High RF Power Handling Applications
    Seo, Wonwoo
    Kim, Sunghyuk
    Ko, Byunghun
    Lee, Jehwan
    Choi, Yongbae
    Sim, Taejoo
    Kim, Junghyun
    [J]. 2024 IEEE 24TH TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, SIRF, 2024, : 21 - 24
  • [6] High Q-factor resonant photoluminescence from Ge-on-Insulator microdisks
    Xu, Xuejun
    Hashimoto, Hideaki
    Yoshida, Keisuke
    Sawano, Kentarou
    Maruizumi, Takuya
    [J]. SILICON PHOTONICS AND PHOTONIC INTEGRATED CIRCUITS V, 2016, 9891
  • [7] Rigorous Model for the Design of Ultra-High Q-Factor Resonant Cavities
    Ciminelli, Caterina
    Innone, Filomena
    Brunetti, Giuseppe
    Conteduca, Donato
    Dell'Olio, Francesco
    Tatoli, Teresa
    Armenise, Mario N.
    [J]. 2016 18TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS (ICTON), 2016,
  • [8] EFFECT OF THE Q-FACTOR ON THE FLUCTUATION SPECTRUM IN A RESONANT INVERTER
    GOLFELD, GB
    BOGDANOV, NN
    [J]. TELECOMMUNICATIONS AND RADIO ENGINEERING, 1989, 44 (11) : 150 - 152
  • [9] Effect of gold coating on the Q-factor of a resonant cantilever
    Sandberg, R
    Molhave, K
    Boisen, A
    Svendsen, W
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (12) : 2249 - 2253
  • [10] Ultrathin High Q-Factor Perfect Metamaterial Absorber for Sensing Applications
    Kaur, Kanwar Preet
    Upadhyaya, Trushit
    Pandya, Killol
    Patel, Upesh
    [J]. 2023 IEEE WIRELESS ANTENNA AND MICROWAVE SYMPOSIUM, WAMS, 2023,
12345