Miniaturized interferometric 3-D sensor for shape measurement inside of cutting lathes

被引：1

作者：

Zhang, Hao ^{[1
]}

Kuschmierz, Robert ^{[1
]}

Czarske, Juergen ^{[1
]}

机构：

[1] Tech Univ Dresden, Lab Measurement & Sensor Syst Tech, Fac Elect & Comp Engn, D-01062 Dresden, Germany

来源：

8TH CIRP CONFERENCE ON HIGH PERFORMANCE CUTTING (HPC 2018) | 2018年 / 77卷

关键词：

in-situ; on-line; shape and diameter metrology; interferometry; control of machining operations; VELOCITY;

D O I：

10.1016/j.procir.2018.08.207

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We propose an in-situ coordinate measurement machine based on a Mach-Zehnder interferometer. The sensor system enables the simultaneous measurement of axial distance and lateral velocity at rough and fast rotating objects. This allows to guarantee ever-decreasing tolerances, measurements of surface profile, roundness and absolute diameter of workpieces inside of lathes. With a camera based detection, measurement uncertainties below 100 nm can be achieved. Furthermore, cameras allow an in-situ calibration of the measurement system. By employing coherent fiber bundles, a robust probe without active parts in the lathe was realized. An extended measurement volume was achieved for a 3-D shape measurement without scanning. (C) 2018 The Authors. Published by Elsevier Ltd.

引用

页码：46 / 49

页数：4

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