Porous silicon based extended-bandwidth rugate filters for mid-infrared application

被引：8
|
作者：
Ishikura, Nobuyuki [1 ]
Fujii, Minoru [1 ]
Nishida, Kohei [1 ]
Hayashi, Shinji [1 ]
Diener, Joachim [2 ]
机构：
[1] Kobe Univ, Grad Sch Engn, Dept Elect & Elect Engn, Nada Ku, Kobe, Hyogo 6578501, Japan
[2] Tech Univ Munich, Phys Dept E16, D-85747 Garching, Germany
来源：
INFRARED PHYSICS & TECHNOLOGY | 2010年 / 53卷 / 04期
关键词：
Porous silicon; Rugate filter; Infrared; OPTICAL-PROPERTIES; APODIZATION; MIRRORS;
D O I：
10.1016/j.infrared.2010.04.005
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Porous silicon-based rugate filters operating in the mid-infrared spectral range are fabricated by electrochemical etching of bulk silicon wafers. The rugate filter has a high reflectivity stop-band at 5 mu m with no higher-order harmonics and very small sidelobes. Furthermore, broadband high pass filter having the cutoff wavelength in a mid-infrared range is demonstrated by combining five rugate structures. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：292 / 294
页数：3
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