Porous silicon based rugate filters

被引：0
|
作者：
Ilyas, S [1 ]
Reece, PJ [1 ]
Salvador, GP [1 ]
Böcking, T [1 ]
Gal, M [1 ]
机构：
[1] Univ New S Wales, Sch Phys, Sydney, NSW 2051, Australia
来源：
COMMAD 04: 2004 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES, PROCEEDINGS | 2005年
关键词：
optical filter; porous silicon; rugate filter;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the design and fabrication of porous silicon based rugate filters. We have achieved very narrow linewidth, high reflectivity optical filters made entirely from silicon by continuously varying of the refractive index of Si and apodizing the index profile of the structure.
引用
收藏
页码：169 / 172
页数：4
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