A kinetic model for precipitation of oxygen in silicon

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作者：

Senkader, S

Hobler, G

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来源：

EARLY STAGES OF OXYGEN PRECIPITATION IN SILICON | 1996年 / 17卷

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O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

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页码：447 / 454

页数：8

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