Synthesis of InN nanowires grown on droplets formed with Au and self-catalyst on Si(111) by using metalorganic chemical vapor deposition

被引:4
|
作者
Yun, Seok-Hyo [1 ]
Kissinger, Suthan [1 ]
Kim, Don Wook [1 ]
Cha, Jun-Ho [1 ]
Ra, Yong-Ho [1 ]
Lee, Cheul-Ro [1 ]
机构
[1] Chonbuk Natl Univ, Sch Adv Mat Engn, Coll Engn, Res Ctr Adv Mat Dev, Chonju, Chonbuk, South Korea
关键词
BAND-GAP; NITRIDE NANOWIRES; EMISSION; ENERGY;
D O I
10.1557/JMR.2010.0219
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrated the growth of indium nitride (InN) nanowires on Si(111) substrates by metalorganic chemical vapor deposition without the use of any intermediate GaN or AIN buffer layer. The InN nanowires were grown by forming the Au + In droplets and In droplets on the Au- and In-coated Si substrate. The growth conditions such as chamber pressure, chamber temperature, reaction gas flow rate, and carrier gas flow rate were optimized to yield nanowires free from contamination. Depending on the growth parameters different growth regimes for the InN nanowires were identified. The strength of self-catalytic route has been highlighted. The morphology and microstructures of samples were characterized by x-ray diffraction and scanning electron microscopy (SEM). The transmission electron microscopy and SEM investigations showed that the InN nanowires are single crystals with diameters ranging from 40 to 400 nm, and lengths up to 3 mu m. Photoluminescence spectra of the InN nanowires showed a strong broad emission peak at 0.77 eV.
引用
收藏
页码:1778 / 1783
页数:6
相关论文
共 50 条
  • [31] Tilt deformation of metalorganic chemical vapor deposition grown GaP on Si Substrate
    Suzuki, Takayuki
    Mori, Masatoshi
    Jiang, Z.K.
    Soga, Tetsuo
    Jimbo, Takashi
    Umeno, Masayoshi
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (07): : 2079 - 2084
  • [33] Non-polar InGaN quantum dots grown on the m-plane of n-GaN nanowires by a self-catalyst method using metal organic chemical vapor deposition
    Yoo, Hee-Il
    Ra, Yong-Ho
    Navamathavan, R.
    Choi, Yong-Hyun
    Park, Ji-Hyeon
    Lee, Cheul-Ro
    CRYSTENGCOMM, 2014, 16 (32) : 7580 - 7586
  • [34] Strain in GaP films heteroepitaxially grown on Si by metalorganic chemical vapor deposition
    Nakamura, K
    Fuyuki, T
    Matsunami, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (08): : 4231 - 4233
  • [35] Effects of thickness on dislocations on GaP on Si grown by metalorganic chemical vapor deposition
    Soga, Tetsuo
    Jimbo, Takashi
    Umeno, Masayoshi
    Japanese Journal of Applied Physics, Part 2: Letters, 1993, 32 (6 A):
  • [36] Metalorganic chemical vapor deposition of InN on GaN/sapphire template by using thin InN buffer layer
    Ju, Jin-Woo
    Lee, Joo In
    Lee, In-Hwan
    THIN SOLID FILMS, 2006, 515 (04) : 2291 - 2294
  • [37] Evolution of Threading Dislocation Density and Stress in GaN Films Grown on (111) Si Substrates by Metalorganic Chemical Vapor Deposition
    X. Weng
    J. D. Acord
    A. Jain
    E. C. Dickey
    J. M. Redwing
    Journal of Electronic Materials, 2007, 36 : 346 - 352
  • [38] Growth and optical properties of InP nanowires formed by Au-assisted metalorganic chemical vapor deposition: Effect of growth temperature
    Guo, Jingwei
    Huang, Hui
    Ren, Xiaomin
    Yan, Xin
    Cai, Shiwei
    Wang, Wei
    Wang, Qi
    Huang, Yongqing
    Zhang, Xia
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2011, 29 (03):
  • [39] Crack-free InAlGaN quaternary alloy films grown on Si(111) substrate by metalorganic chemical vapor deposition
    Wu, JJ
    Li, DB
    Lu, Y
    Han, XX
    Li, JM
    Wei, HY
    Kang, TT
    Wang, XH
    Liu, XL
    Zhu, QS
    Wang, ZG
    JOURNAL OF CRYSTAL GROWTH, 2004, 273 (1-2) : 79 - 85
  • [40] Evolution of threading dislocation density and stress in GaN films grown on (111) Si substrates by metalorganic chemical vapor deposition
    Weng, X.
    Acord, J. D.
    Jain, A.
    Dickey, E. C.
    Redwing, J. M.
    JOURNAL OF ELECTRONIC MATERIALS, 2007, 36 (04) : 346 - 352