Surface plasmon resonance sensor with silicon-based prism coupling

被引:5
|
作者
Patskovsky, S [1 ]
Kabashin, AV [1 ]
Meunier, M [1 ]
Luong, JHT [1 ]
机构
[1] Ecole Polytech Montreal, Laser Proc Lab, Dept Genie Phys, Montreal, PQ H3C 3A7, Canada
关键词
surface plasmon resonance; silicon; dispersion; infrared;
D O I
10.1117/12.477863
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.
引用
收藏
页码:144 / 148
页数:5
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