Simple technique for the evaluation of the finish of an edge using interference phenomena in a shadow region

被引：1
|
作者：
Kanai, N
Ito, H
机构：
[1] Fukui Institute of Technology, Gakuen, Fukui, 910
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 01期
关键词：
DIFFRACTION; INTERFERENCE; MEASURING METHODS; ROUGHNESS; SURFACE FINISHING;
D O I：
10.1063/1.1146583
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper proposes the simple technique for evaluating a straight edge using the interference phenomena in the shadow region of various sample edges. Evaluation is easier and more effective in the shadow region than in the bright region because of the higher sensitivity of an edge to a shadow's diffraction pattern. (C) 1996 American Institute of Physics.
引用
收藏
页码：291 / 293
页数：3
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