Simple technique for direct patterning of nanowires using a nanoslit shadow-mask

被引：0

作者：

Tong, H. D. ^{[1
]}

Jansen, H. V. ^{[1
]}

Tas, N. R. ^{[1
]}

Gadgil, V. J. ^{[1
]}

Carlen, E. T. ^{[1
]}

van den Berg, A. ^{[1
]}

机构：

[1] Univ Twente, MESA Inst Nanotechnol, POB 217, NL-7500 AE Enschede, Netherlands

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

nanowires; nanofabrication; focused-ion-beam machining; nanoslit shadow-mask;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanowires of various lengths and widths have been fabricated using a wafer-scale shadow mask with deposition windows, or nanoslits, created with focused ion beam machining. Metallic nanowires with widths down to 50 nm and lengths up to 100 mu m have been realized. Measurements of electrical I-V characteristics show linear behavior of nanowires with widths and thickness each around 50 nm.

引用

页数：2

共 50 条

[1] A TECHNIQUE FOR THE AUTOMATED MEASUREMENT OF THE RESOLUTION OF SHADOW-MASK CRT DISPLAYS
VERON, H
OCALLAGHAN, JP
[J]. PROCEEDINGS OF THE SID, 1987, 28 (04): : 445 - 447
[2] Self-aligned 3D shadow-mask technique for patterning deeply recessed surfaces of MEMS devices
Brugger, J
Andreoli, C
Despont, M
Drechsler, U
Rothuizen, H
Vettiger, P
[J]. EUROSENSORS XII, VOLS 1 AND 2, 1998, : 19 - 22
[3] All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning
Kim, G
Kim, B
Brugger, J
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2003, 107 (02) : 132 - 136
[4] Shading impact on the electricity generated by a photovoltaic installation using solar Shadow-Mask
Nfaoui, Mohamed
Abouloifa, Walid
Hayani-Mounir, Sanaa
Roboa, Mohamed Yassine
El-Hami, Khalil
[J]. Energy Harvesting and Systems, 2024, 11 (01)
[5] Vibration control of shadow-mask with tension gradient using multiple dynamic absorber
Kim, Won-Jin
Park, Chong-Hyun
[J]. JOURNAL OF SOUND AND VIBRATION, 2008, 311 (3-5) : 756 - 766
[6] Fabrication of a submicron patterned electrode using an electrospun single fiber as a shadow-mask
Ishii, Yuya
Sakai, Heisuke
Murata, Hideyuki
[J]. THIN SOLID FILMS, 2009, 518 (02) : 647 - 650
[7] High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through
Burger, GJ
Smulders, EJT
Berenschot, JW
Lammerink, TSJ
Fluitman, JHJ
Imai, S
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) : 669 - 673
[8] Efficient Investigation of High-Performance Perovskite Solar Cells Based on Shadow-Mask Kits with Uniform Patterning and Antishadowing Capabilities
Liu, Kong
Wu, Yulin
Li, Chao
Sun, Yang
Li, Qicong
Yang, Cheng
Jia, Xiaohao
Islam, Md. Rasidul
Wang, Zhijie
Qu, Shengchun
Wang, Zhanguo
[J]. ADVANCED MATERIALS TECHNOLOGIES, 2021, 6 (12)
[9] Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask
Shin, HJ
Choi, JH
Yang, HJ
Park, YD
Kuk, Y
Kang, CJ
[J]. APPLIED PHYSICS LETTERS, 2005, 87 (11)
[10] RUSSIAN COLOUR SETS IN PRODUCTION - 4 MODELS USING SHADOW-MASK TUBES FOR SECAM 3 TRANSMISSIONS
不详
[J]. WIRELESS WORLD, 1968, 74 (1391): : 113 - &

← 1 2 3 4 5 →