Patterning of ferroelectric nanodot arrays using a silicon nitride shadow mask

被引：34
|
作者：
Shin, HJ
Choi, JH
Yang, HJ
Park, YD
Kuk, Y
Kang, CJ
机构：
[1] School of Physics, Center for Science in Nanometer Scale, Seoul National University
[2] Department of Physics, Myoungji University, Gyeonggi
来源：
APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 11期
关键词：
D O I：
10.1063/1.2048818
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We grew well-ordered arrays of ferroelectric Pb(Zr0.2Ti0.8)O-3 (PZT) nanodots on a SrRuO3/SrTiO3 substrate by pulsed laser deposition. A silicon nitride shadow mask with ordered holes was used for patterning of the PZT arrays. Each dot has a height of similar to 15 nm and a diameter of similar to 120 nm with a similar dome shape over a large area. The ferroelectric properties of individual PZT dots were investigated by piezoresponse force microscopy. A single dot could be polarized individually and the polarized state remained unrelaxed to similar to 20 min.
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页数：3
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