In recent years, the concept of social responsibility and role of research and innovation in solving society challenges has become very widespread. The responsibility of research and innovations in universities and scientific centers is very significant. The purpose of this study was recognizing evolutionary path of the concepts of "Responsible Research" and "Responsible Innovation" based on scientometric analysis and Systematic Literature Review(SLR). A dataset of records Published between 1995 and 2021 is collected from Web of Science Database (572 articles from Web of Science). The obtained results were statistically analyzed and classified based on bibliometric library of R software. This study shows that Responsible Research and Innovation concept has been evolving in recent years with the development of scientific concepts such as social innovation, corporate social responsibility and university social responsibility. In this study, the selected articles identified by the SLR method from different textual dimensions and emergence of new concepts are analyzed. In this study, based on the SLR method, 33 concepts in 8 different themes for responsible research and responsible innovation were identified. Also, based on the scientometric analysis and word occurrences analysis, the 10 most used words were identified. Finally, through a collaborative review, 5 key concepts for this area have been identified and introduced. These 5 concepts include public engagement, sustainability, ethics, governance and RRI. So we gain insights to better conduct RRI in our societies