New technique for flexible and rapid measurement of precision aspheres - art. no. 661629

被引:10
|
作者
Garbusi, Eugenio [1 ]
Pruss, Christof [1 ]
Liesener, Jan [1 ]
Osten, Wolfgang [1 ]
机构
[1] Univ Stuttgart, Inst Tech Opt, D-70596 Stuttgart, Germany
关键词
asphere; interferometry; microoptics;
D O I
10.1117/12.727898
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new interferometric technique for the measurement of aspheric elements based on multiple test beams is presented. By means of an array of sources (Point Source Array) an aspheric surface is illuminated under different angles-which allow the measurement of the zones where the local gradient of the test piece is compensated. One of the main advantages of the system is that the measurement process is performed in parallel (many sources are used at the same time) thus requiring extremely short measurement time in comparison with other available subaperture testing techniques. Another important aspect is that the asphere stays in the same position during the whole process; there are no mechanical movements of the test part involved. The technique allows the measurement of strong aspheric elements with departures from the best fit sphere up to +/- 10 degrees. The method was developed to obtain accuracies of up to lambda/30 and better. Simulations and first experimental results are presented.
引用
收藏
页码:61629 / 61629
页数:11
相关论文
共 50 条
  • [41] Constraining new forces in the Casimir regime using the isoelectronic technique -: art. no. 240401
    Decca, RS
    López, D
    Chan, HB
    Fischbach, E
    Krause, DE
    Jamell, CR
    PHYSICAL REVIEW LETTERS, 2005, 94 (24)
  • [42] Oblique shocks in rapid granular flows -: art. no. 077101
    Hákonardóttir, KM
    Hogg, AJ
    PHYSICS OF FLUIDS, 2005, 17 (07) : 1 - 10
  • [43] A prototype system for high precision 3D measurement based on grating method - art. no. 683442
    Li, Zhongwei
    Shi, Yusheng
    Wang, Conglun
    Zhou, Gang
    Qin, Dahui
    OPTICAL DESIGN AND TESTING III, PTS 1 AND 2, 2008, 6834 : 83442 - 83442
  • [44] Precision measurement and compensation of optical Stark shifts for an ion-trap quantum processor -: art. no. 143602
    Häffner, H
    Gulde, S
    Riebe, M
    Lancaster, G
    Becher, C
    Eschner, J
    Schmidt-Kaler, F
    Blatt, R
    PHYSICAL REVIEW LETTERS, 2003, 90 (14)
  • [45] Development of high precision gravity center position measurement system for large heavy vehicles - art. no. 604241
    Zhao, XT
    Jiang, HZ
    Zheng, ST
    Han, JW
    ICMIT 2005: Control Systems and Robotics, Pts 1 and 2, 2005, 6042 : 4241 - 4241
  • [46] Precision of chiral-dispersive calculations of ππ scattering -: art. no. 074005
    Peláez, JR
    Ynduráin, FJ
    PHYSICAL REVIEW D, 2003, 68 (07):
  • [47] Special techniques in ultra-precision machining - art. no. 67221
    Li, Li
    Xu, Min
    Dong, Chen
    JunHua, Wang
    ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, PTS 1 AND 2, 2007, 6722 : 67221 - 67221
  • [48] Precision microstate counting of small black rings - art. no. 071601
    Dabholkar, A
    Iizuka, N
    Iqubal, A
    Shigemori, M
    PHYSICAL REVIEW LETTERS, 2006, 96 (07)
  • [49] Precision determination of |Vub| from inclusive decays -: art. no. 113004
    Bauer, CW
    Ligeti, Z
    Luke, M
    PHYSICAL REVIEW D, 2001, 64 (11)
  • [50] In situ characterization technique for nanotribological investigations -: art. no. 016102
    Deladi, S
    Berenschot, JW
    Krijnen, GJM
    De Boer, MJ
    Tas, NR
    Elwenspoek, MC
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (01):