Temperature Dependent Study of Random Telegraph Noise in Gate-All-Around PMOS Silicon Nanowire Field-Effect Transistors

被引:15
|
作者
Hong, B. H. [1 ,2 ]
Choi, L. [1 ,2 ]
Jung, Y. C. [1 ,2 ]
Hwang, S. W. [1 ,2 ]
Cho, K. H. [3 ]
Yeo, K. H. [3 ]
Kim, D. -W. [3 ]
Jin, G. Y. [3 ]
Park, D. [3 ]
Song, S. H. [4 ]
Lee, Y. Y. [5 ]
Son, M. H. [5 ]
Ahn, D. [5 ]
机构
[1] Korea Univ, Res Ctr Time Domain Nanofunct Devices, Seoul 136701, South Korea
[2] Korea Univ, Sch Elect Engn, Seoul 136701, South Korea
[3] Samsung Elect Co, Semicond R&D Ctr, Hwasung City 445701, South Korea
[4] Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea
[5] Univ Seoul, Seoul 130743, South Korea
关键词
Gate all around (GAA); random telegraph noise (RTN); silicon nanowire FET (SNWFET); temperature dependence; MODEL;
D O I
10.1109/TNANO.2010.2045006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the random telegraph noise observed in gate-all-around (GAA) PMOS silicon nanowire FETs (SNWFETs) with the radius of 5 nm, at various temperatures (Ts) down to 4.2 K. From the T-dependence of the capture/emission time, we obtain the energy and the charging status of the trap states. The gate bias dependence and the T-dependence of the scattering coefficient-mobility product extracted from the relative fluctuation amplitude of the drain current are consistent with the fact that the surface roughness scattering is dominant in GAA PMOS SNWFETs.
引用
收藏
页码:754 / 758
页数:5
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