Optimization of Parameters for Deposition of SnO2 Films by Sol-Gel using Taguchi Method

被引：0

作者：

Ammaih, Youssef ^{[1
]}

Hartiti, Bouchaib ^{[1
]}

Ridah, Abderraouf ^{[1
]}

Lfakir, Abderrazak ^{[1
]}

Thevenin, Philippe ^{[2
]}

Siadate, Maryam ^{[2
]}

机构：

[1] Univ Hassan 2, FSTM, MAC & PM Lab, Casablanca, Morocco

[2] Univ Lorraine, LCOMS Lab, LMOPS Lab, Metz, France

来源：

PROCEEDINGS OF 2015 3RD IEEE INTERNATIONAL RENEWABLE AND SUSTAINABLE ENERGY CONFERENCE (IRSEC'15) | 2015年

关键词：

Taguchi method; Tin Oxide; sol gel; ZNO; GAS;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Transparent conductive SnO2 films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of Tin (II) ions, annealing temperature and pre-annealing temperature. By employing the analysis of variance, we found that the annealing temperature and the precursor are the most influencing parameters on the properties of SnO2 films. Under the optimized deposition conditions, the SnO2 films showed high crystal quality, and high transmittance of 80% in the visible region.

引用

页码：886 / 889

页数：4

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