Optimization of parameters for deposition of ZnO films by sol gel using Taguchi method

被引：9

作者：

Ammaih, Youssef ^{[1
]}

Lfakir, Abderrazak ^{[1
]}

Hartiti, Bouchaib ^{[1
]}

Ridah, Abderraouf ^{[1
]}

Siadat, Meryame ^{[2
]}

Thevenin, Philippe ^{[3
]}

机构：

[1] FSTM, ANEPMAER Grp, MAC & PM Lab, Mohammadia, Morocco

[2] Univ Lorraine, LCOMS Lab, Nancy, France

[3] Univ Lorraine, LMOPS Lab, Nancy, France

来源：

MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2016年 / 627卷 / 01期

关键词：

ZnO; Texture coefficient; Sol-gel; Spin Coating; Taguchi method; SPRAY-PYROLYSIS; GROWTH;

D O I：

10.1080/15421406.2015.1137268

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

ZnO transparent conductive films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of zinc (II) ions. Zn2+, annealing temperature T-r and pre-annealing temperature T-P. By employing the analysis of variance, we found that the annealing temperature T-r and the precursor Zn2+ are the most influencing parameters on the properties of ZnO films. Under the optimized deposition conditions, the ZnO films showed high crystal quality, and high transmittance of 90% in the visible region.

引用

页码：176 / 182

页数：7

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