Properties of tungsten-titanium sputtered coatings

被引：2
|
作者：
Petrovic, S [1 ]
Perusko, D [1 ]
Rakocevic, Z [1 ]
Gakovic, B [1 ]
Nenadovic, T [1 ]
机构：
[1] Vinca Inst Nucl Sci, YU-11001 Belgrade, Yugoslavia
来源：
TRENDS IN ADVANCED MATERIALS AND PROCESSES | 2000年 / 352卷
关键词：
deposition; microhardness; scanning tunneling microscopy; W-Ti thin films;
D O I：
10.4028/www.scientific.net/MSF.352.43
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：43 / 48
页数：6
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