Ultrathin TiSiN overcoat protection layer for magnetic media

被引：21
|
作者：
Rose, Franck [1 ]
Marchon, Bruno [1 ]
Rawat, Vijay [1 ]
Pocker, Daryl [2 ]
Xiao, Qi-Fan [2 ]
Iwasaki, Tomio [3 ]
机构：
[1] Hitachi Global Storage Technol Inc, San Jose Res Ctr, San Jose, CA 95135 USA
[2] Hitachi Global Storage Technol Inc, Mat Lab San Jose, San Jose, CA 95119 USA
[3] Hitachi Ltd, Hitachi Res Lab, Hitachinaka, Ibaraki 3120034, Japan
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2011年 / 29卷 / 05期
关键词：
NITRIDE; INTERFACE; CORROSION; ABSORPTION; OXIDATION;
D O I：
10.1116/1.3607423
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
TiSiN ultrathin films (10-50 angstrom) deposited by reactive magnetron sputtering from TixSiy targets were used as anticorrosion overcoats to protect Co-containing recording media. Films' growth, structure, composition, resistance against hydrolysis, and anticorrosion performances were studied by spectroscopy (x-ray reflectivity and diffraction, ellipsometry, x-ray photoelectron spectroscopy, Fourier transform infrared reflection-absorption spectroscopy) and simulated by molecular dynamics ( using modified Tersoff-type interatomic interactions). TiSiN ultrathin overcoats were found to be dense amorphous oxynitrides containing Ti-O-Si linkages. The conversion of SiNx into SiOx by hydrolysis was prevented by introducing less than 20 at. % of Ti in the films. Thanks to the formation of Ti-O-Si linkages which densify the films and reduce oxygen diffusion, good corrosion protection of the magnetic media was achieved down to 28 A TiSiN overcoat thickness. VC 2011 American Vacuum Society. [DOI: 10.1116/1.3607423] A
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页数：11
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